S Type Semiconductor Thermocouple

The diffusion furnace that could perform the oxidation process is composed of a furnace frame, a heater, a heating control device, a temperature measure device, a quartz furnace tube, a push-pull carrier tray, some gas path, and an exhaust gas treatment device. The temperature control requirements of this kind of diffusion furnaces are as follows:

The oxidation diffusion furnace generally uses thermocouples inside and outside the furnace to dynamic control the temperature. Each temperature zone is equipped with one inside and one outside thermocouple to ensure the reliability of the temperature control. S type semiconductor thermocouple(common practice utilizes multi-point thermocouple that has 3-9 different spots to grab temperature info) is often chosen to be the inside thermocouple which is used to sense the temperature of silicon wafer directly, and could translate to precise wafer temperature display.

Duchin Instrument developed types of structures for multi-point thermocouple, multi-point thermocouple calibration equipment for experiments, a type of cold-junction structure formulti-point thermocouple, a type of terminal packaging structure for multi-point thermocouple, types of composite metal protection tube of multi-point thermocouple for oxidation furnace, and other proprietary technologies to meet the requirements of diffusion furnace temperature sensing.The technical parameters of the S type semiconductor thermocouple specialized for photovoltaic equipment are as follows:

Manual Welding

Automatic Welding

Insulation Testing

Laser Marking

Warehouse Managing

Thermocouple Assemble

Vacuum Leak Detection

Surface Polishing

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