1. Core Product Positioning
Our profile thermocouple is a professional, multi-point temperature sensor specially developed for the semiconductor and photovoltaic industries. It is installed directly inside high-temperature furnaces (diffusion furnaces, oxidation furnaces, annealing furnaces) to accurately measure the real-time temperature distribution of silicon wafers, providing reliable thermal profile data for process control and quality assurance.
2. Key Product Advantages
✅ High-Precision Thermal Profile Monitoring Supports 3–9 multi-point temperature measurement, delivering accurate temperature data across the entire furnace zone to eliminate blind spots and ensure uniform heating of silicon wafers.
✅ Superior Stability & Durability Made of high-grade thermal-stable materials, it offers excellent linearity, minimal measurement error, and strong resistance to thermal shock and electromagnetic interference, meeting long-cycle production requirements.
✅ Clean & Process-Friendly Design Optimized for the clean, high-temperature, low-contamination environment of semiconductor furnaces, preventing particle pollution and adverse effects on wafer manufacturing processes.
✅ Highly Customizable for Furnace Compatibility Customizable probe length, diameter, sheath material, and installation method to perfectly match the spatial layout and technical specifications of different furnace models.
3. Technical Specification Table
| Technical Performance | Diffusion Furnace Profile Thermocouple | Oxidation Furnace Profile Thermocouple |
|---|---|---|
| Graduation Type | S, R | K, N |
| Wire/Sheath Diameter | φ0.35~0.5 mm | φ2~4 mm |
| Operating Temperature Range | 0~1100 °C | 0~950 °C |
| Temperature Accuracy | ±1.0 °C | ±1.5 °C or 0.4% t |
| Sheath Length | ≤ 4000 mm | ≤ 4000 mm |
| Sheath Diameter | φ12~18 mm | φ14~22 mm |
| Sheath Material | Quartz | 310S / 321 Stainless Steel |
| Measuring End Structure | Exposed Tip | Insulated Tip |
| Number of Measuring Points | 3~6 Points | 3~9 Points |
| Connection Type | Miniature Connector | Miniature Connector |
| Compensation Cable | SC-2x0.5FPF | KX(NX)-2x0.5FPF |
| Assembly Feature | Multi-point assembly is complex | Multi-point thermocouples can be freely combined |
4. Typical Applications
Our profile thermocouple is widely used in high-precision temperature monitoring and control for:
Semiconductor diffusion furnaces
Semiconductor oxidation furnaces
Annealing furnaces
Photovoltaic cell production furnaces
Other high-temperature process equipment requiring thermal profile measurement
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